MRS(Mask Reclaim System)

1. Outline
MRS is a system that recycles photomask disposed from the semiconductor industry to use as reclaimable photomask and optical material after precision cleaning process.
SILFINE has introduced its own continuous automated system to increase productivity, and is leading the way to customer satisfaction with quality assurance and control.

2. The Characteristics and Strengths of MRS Technology
▷ Use wasted photomask as reclaimable photomask.
▷ Used as material for high-qualified optical industries
▷ One-stop service for the whole process
▷ Creation of value-added through recycling semiconductor waste

3. Properties
▷ size : 5009/6009/6012/6025/others
▷ shape : square type
▷ material : ultra pure synthetic fused silica (quartz)
▷ traits : excellent UV transmission


4. Application
▷ 1. Semi-Grade Reclaimable Photomask
▷ 2. Optical & Visual Substrates : Filter, Mirror, Optical Window, Prism, etc

5. Work FLOW
▷ Work flow (Reclaimable photomask)
▷ Raw material
▷ Incoming inspection
▷ Surface treatment
▷ Cleaning
▷ Rinse/dry
▷ Inspection
▷ Packing

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Address : 374-2, Shinsuri, Eumbongmyeon, AsanCity, Chungnam, 336-862, KOREA.
Tel +82 (0)41 552 5200 Fax +82 (0)41 552 5300
http://www.silfine.com/ , e-mail : info@silfine.com