SRS (SiC slurry Recovery System)

1. Outline
Slurry is used during the sawing process of silicon ingot for semiconductors and solar light, creating slurry waste.
SILFINE’s SRS is a 21st-century environment-friendly business item which effectively separates SiC powder (cutting material) and PEG (dispersion material) from slurry wastes and then highly refines and regenerates. SRS provides our customers to cuts down the cost of production during the semiconductor ingot sawing process by 30~40%.


2. The Characteristics and Strengths of the Technology
■ Creation of new value through SILFINE original technology
- Regeneration of high-price Polyethylene Glycol (PEG) and Silicon Carbide (Sic) contained in slurry waste
- Contribution to semiconductor cost reduction through recycling from semiconductor ingot sawing
■ Recycling of resources: Creation of new value and prevention of environmental pollution through SiC & PEG separation and refinement
■ Reduction of production costs for semiconductors by reduction in silicon waste treatment costs


3. Properties
■ SiC Powder
- Average particle size (um) : 6~12
- Color : Green
- Purity : Higher than 98.5 %

■ PEG
- Color : Colorless
- Water content : Less than 0.5%
- Impurities : Less than 0.5%

4. Product Application
○ Original material for ingot sawing in semiconductor and solar industries

5. WORK FLOW
- Waste slurry → Separator → SiC cake + PEG
- SiC → Step by step Refinement → Dry → Inspection → Packaging
- PEG → Step by step Refinement → Inspection → Packaging


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Tel +82 (0)41 552 5200 Fax +82 (0)41 552 5300 / http://www.silfine.com e-mail : info@silfine.com